Introduction

• DONGZHOU Wafer 2D inspection system can complete the wafer macro inspection and micro inspection, and automatically and safely transfer wafer, which is suitable for wafer inspection from the previous process to the next process.
• The system consists of automatic wafer transmission system, wafer macro-inspection     system and wafer micro-inspection system.

Feature

半导体晶圆2D视觉量测仪器

Dimensions